台輝光科技股份有限公司
◆公司地址: 30272 新竹縣竹北市文興路一段382號3樓 (3F., No. 382, Sec. 1, Wenxing Rd., Zhubei City, Hsinchu County 30272, Taiwan)
◆聯絡電話: +886-3-667-0923
◆Email: contact@plasmati.com.tw
◆公司介紹:
台輝光科技股份有限公司 (Plasma Taiwan Innovation Corporation, Plasma T.I.)成立於2014年，以電漿相關技術為主要研發重點，是台灣本土極少數有能力自行開發高效率平行科學計算模擬軟體的公司，並可提供專業顧問服務，及因應關鍵技術開發客製化模擬軟體。
台輝光科技的研發目標在於協助半導體相關製程提升品質、縮短新技術如電漿蝕刻、鍍膜、濺鍍、物理蒸鍍、常低壓電漿等的開發時間。此外，也可協助電漿應用新領域，如生物、醫療、國防太空科技等的研發，大幅縮短設計時間，節省開發成本。
台輝光科技的技術源自交通大學和國內外研究機構、廠商長期合作累積下來的寶貴模擬實務經驗，致力於研發國際級低溫電漿(low-temperature plasma)、稀薄氣體 (Rarefied Gas Dynamics; RGD)、計算流體力學(Computational Fluid Dynamics, CFD)與多重物理計算的相關模擬軟體，並成功開發了一套多重物理平行計算整合平台：
RAPIT (Rigorous Advanced Plasma Integration Testbed)
可以整合各種不同數值方法（連續與粒子）在時間/空間/能量尺度的複雜耦合物理化學特性。
Plasma T.I. (Plasma Taiwan Innovation Corporation) established in 2014 aiming at becoming a software company in scientific computing in the belief that the plasma technology brings humanity to the next level.
We dedicate to develop integrated/efficient/high-fidelity numerical tools and provide valued technical consulting services for the simulation and modeling of plasma, rarefied gas dynamics, non-reactive and reactive gas flows used in various kinds of industrial processes and technologies, which include semiconductor fabrication, low-pressure solar-cell fabrication process, vacuum dynamics, MEMS/NEMS devices, hypersonic/reentry flow, radiative heat transfer, combustion and rocket propulsion (liquid, solid and hybrid), to name a few.
In addition, our modeling team is capable of providing development of quantitative chemical kinetics (channels and rate constants) for new reactive process using first-principle ab initio calculations for gas-phase and surface reactions.
Plasma T.I. has practically developed a conceptually new multi-physics software based on modern high-performance computing platform. The proven technology can shorten the development time and bring off the phenomenal performance.
Plasma Investigation and Research
Gas discharge is the promising technology in various applications. However, the underlying complexity has not been understood completely.
• requiring multidisciplinary knowledge
• evolving on widely separated multiscale phenomenon
• difficult and costly to conduct the measurement
• the design and controlling of plasma source based on trial-and-error approach
We believe the computational plasma considering multi-scale multi-physics is one of the best ways for advancing plasma investigation and research.
技術簡介 Technology
Plasma Processing Simulation Platform
ICP chamber
核心技術Core Technique – 多重物理求解器Multi-physics Solvers
Plasma T.I. has developed four numerical solvers of low-temperature plasma and gas flow applications for wide range of physics scales. Multi-physics simulation for any applications can be achieved by integrating these solvers. •ultraSPARTS – direct simulation Monte Carlo (DSMC) •ultraPICA – particle-in-cell with Monte Carlo method (PIC-MCC) •ultraNS – all-speed gas flow solver •ultraFM – plasma fluid modelingThe software based on RAPIT includes, but is not limited to, the individual solver or hybrid solvers of the above. The speedy development of new solver is implemented by defining the physics function without regarding the hardware, operating system, and parallel programming.
Old CFD companies are stumbling by the old veridical integration of software structure, resulting in the slow or no reaction to the customers. Emerging multi-physics software are designed or integrated by a mission-oriented mindset, leading to enormous overhead in adding extra physics solvers.
Multi-physics Software should support the following features:
⏺ solid, liquid, gas, and plasma
⏺ electromagnetic wave
⏺ cross multi-scale
⏺ seamless integration of multiple physics
⏺ coefficient database
⏺ easy to access
⏺ high-performance computing
Parallel Efficiency
Parallel performance of RAPIT on Plasma T.I. cluster and NCHC ALPS cluster
多重物理平行計算整合平台RAPIT
RAPIT
RAPIT stands for Rigorous Advanced Plasma Integration Testbed which is an unique software architecture developed by Plasma T.I.. The testbed consists of four major simulation codes, which include direct simulation Monte Carlo code (ultraSPARTS), particle-in-cell Monte Carlo code (ultraPICA), neutral gas flow modeling code (ultraNS) and plasma fluid modeling code (ultraFM). All these codes are developed based on unstructured-grid topology and can be hybridized for modeling physical problems with multi-physics problems with complex geometry.
RAPIT is an unique Application Programming Interface (API) designed by Plasma T.I., which can help to develop multi-physics software from scientific and engineering concept to high performance computing. RAPIT can deal with complex geometry using 2D/2D-axisymmetric/3D hybrid unstructured grid with parallel computing, which can help the customers reduce the computational runtime from months to days.
ultraSPARTS
ultraSPARTS (ultra-fast Statistical PARTicle Simulation Package) is a particle-based C++ object-oriented simulation code designed for efficiently solving gas flow problems with rarefaction and strong non-equilibrium. This software employs the direct simulation Monte Carlo (DSMC) method for directly solving the Boltzmann equation statistically. It can deal with rarefied gas flows with complex geometry using 2D/2D-axisymmetric/3D hybrid unstructured grid. The package has been applied for modeling general rarefied gas dynamics such as hypersonic non-reacting and reacting gas flows, vacuum pumping flow, satellite plume impingement, MEMS/NEMS gas flow, comet gas/dust plume, and PVD deposition (OLED, CIG, E-beam, etc.), to name a few.
ultraPICA
ultraPICA (ultra-fast Particle-In-Cell Monte Carlo Analysis) is the software based on particle-in-cell with Monte Carlo method for the kinetic simulation of particles interacting with electromagnetic fields. ultraPICA is the perfect method to investigate plasmas such as PECVD, hall thruster of spacecraft, non-equilibrium properties (IEDF, EEDF, IADF) for feature-scale simulation, and so on. ultraPICA can simulate on 2D/3D/axisymmetric unstructured grids with high-performance parallel computing technology. Dynamic Loading Balance (DLB) between each processor is executed automatically for the best efficiency of computation, which is rarely seen from other software packages. The package can be used for modeling general very low-pressure gas discharges such as DC/RF magnetron sputtering plasma, ICP and UHV PECVD, to name a few.
ultraNS
ultraNS (ultra-fast Navier-Stokes Equation Modeling Package) is a sophisticated 2D/2D-axisymmetric/3D unstructured grid gas flow solver for modeling flow, heat transfer, and reactions at all-speed. Based on RAPIT, ultraNS can study multi-physics of plasma-flow interaction through the integration with ultraFM and ultraPICA.
ultraFM
ultraFM (ultra-fast Plasma Fluid Modeling Package) is a continuum-based simulation code designed for solving the velocity moments of the Boltzmann equation considering charged particles. It can deal with gas discharges (low-temperature plasma) with complex geometry using 2D/2D-axisymmetric/3D hybrid unstructured grid with parallel computing through message passing interface (MPI) that can be run on typical PC clusters. The package can be used to model general low-temperature plasma or gas discharges with complex chemistry and complex geometry such as PECVD, ICP, and APP, to name a few.
References
1. Yun-Min Lee, Meng-Hua Hu, J.-S. Wu, “A Parallel Comutational Platform -- RAPIT (Rigorous Advanced Plasma Integration Testbed,” P.6-7, WHPTCA, May 2019.
2. Yun-Min Lee, Meng-Hua, Hu, J.-S. Wu, "Progress on Developing a Multi-Physics Simulation Platform: Rigorous Advanced Plasma Integration Testbed (RAPIT)”, Plasmadynamics and Lasers Conference, 2018.